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Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

Boyd, Ian W.

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators
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Category

Testo

Nature

Monografia

Title

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

Names

[Autore] Boyd, Ian W.

Description

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators / Boyd, Ian W.

Edition

New York: Springer Verlag, 1987

Physical description

(Springers Series in Materials Science, 3)

Place of publication

320 p.; 23 cm

Village

GRAN BRETAGNA

Tongue

INGLESE

Source

Biblioteche SBN Sardegna

ID

IT\ICCU\RMS\1483899

Resources links

http://id.sbn.it/bid/RMS1483899
Biblioteca del Distretto biomedico scientifico - sezione Beniamino Orrù

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