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Microelectronic processing : an introduction to the manufacture of integrated circuits

Ruska, W. S.

Category

Nature

Title

Microelectronic processing : an introduction to the manufacture of integrated circuits

Description

Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska

Physical description

XVIII, 430 p. : ill. ; 25 cm.

Standard numbers

ISBN: 0070542805

Date

c1987

Place of publication

New York [etc.]

Village

STATI UNITI

Tongue

ID

IT\ICCU\UBO\0998444
Biblioteca del Distretto biomedico scientifico - sezione Beniamino Orrù

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