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Plasma synthesis and etching of electronic materials : Symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Materials Research Society Symposium

Category

Nature

Title

Plasma synthesis and etching of electronic materials : Symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Description

Plasma synthesis and etching of electronic materials : Symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / Editors: R.P.H. Chang, B. Abeles

Physical description

XIII, 522 p. : ill. ; 24 cm.

Standard numbers

ISBN: 0931837030

Date

1985

Place of publication

Pittsburg, Pa.

Village

STATI UNITI

Tongue

ID

IT\ICCU\CAG\1778208
Biblioteca del Distretto biomedico scientifico - sezione Beniamino Orrù

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