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Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

Boyd, Ian W.

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

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Testo

Natura

Monografia

Titolo

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators

Nomi

[Autore] Boyd, Ian W.

Descrizione

Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators / Boyd, Ian W.

Edizione

New York: Springer Verlag, 1987

Descrizione Fisica

(Springers Series in Materials Science, 3)

Luogo di pubblicazione

320 p.; 23 cm

Paese

GRAN BRETAGNA

Lingua

INGLESE

Fonte

Biblioteche SBN Sardegna

ID

IT\ICCU\RMS\1483899

Link Risorse

http://id.sbn.it/bid/RMS1483899

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